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发明名称
VACUUM TREATING DEVICE
摘要
申请公布号
JPH0931654(A)
申请公布日期
1997.02.04
申请号
JP19950205345
申请日期
1995.07.19
申请人
ULVAC JAPAN LTD
发明人
ODAGI HIDEYUKI
分类号
C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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