Method of passivating group III-V surfaces

摘要

A method of passivating a surface of a Group III-V compound substrate comprising exposing the surface to a solution comprising P2S5, S and (NH4)2S for a time sufficient to prevent formation of segregated surface atoms and oxides on the substrate surface, thereby minimizing the density of surface states thereof, the solution containing P2S5, S and (NH4)2S in a ratio.