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发明名称
摘要
申请公布号
JPH09501132(A)
申请公布日期
1997.02.04
申请号
JP19940500948
申请日期
1994.05.25
申请人
发明人
分类号
C30B15/00;C30B15/04;H01L21/24;(IPC1-7):C30B15/04
主分类号
C30B15/00
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代理人
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