| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrapure water preparation apparatus wherein, without generating such problems as oxidative deterioration of an ion exchange resin, propagation of microorganisms and reeluation of org. substances, stable operation can be performed with less electric power consumption and space saving and very small amt. of the org. substances in the water to be treated can be nearly completely eliminated. SOLUTION: This ultrapure water preparation apparatus is provided with an ordinary pressure deaeration apparatus 3 for eliminating dissolved gas and volatile org. substances in the water to be treated, a reverse osmosis apparatus 6 for eliminating salts, org. substances, fine particles and live bacteria dissolved or dispersed therein, the first UV org. substance decomposing apparatus 7 for decomposing the org. substances by irradiating UV rays, the first ion exchange apparatus 8 for eliminating ion components and a vacuum deaeration apparatus for eliminating dissolved gas and evaporative org. substances. In addition, the second UV ray org. substance decomposition apparatus for irradiating UV rays to decompose org. substances and the second ion exchange apparatus 12 for eliminating ion components are successively provided along the flow path of the water to be treated. |
