| 发明名称 |
JIG FOR SPACING |
| 摘要 |
<p>PURPOSE:To perform spacing of pellets without disturbing the rows of pellets by placing pellet groups in a discontinuously arrayed state in a rubber plate thereafter stretching this rubber plate.</p> |
| 申请公布号 |
JPS5339854(A) |
申请公布日期 |
1978.04.12 |
| 申请号 |
JP19760113694 |
申请日期 |
1976.09.24 |
| 申请人 |
HITACHI LTD |
发明人 |
OKAMURA SHINAYA;SATOU AKIHIKO;SATOU HIROSHI |
| 分类号 |
H01L21/68;H01L21/301;H01L21/683 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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