Opto-electronic measuring of object displacement using one surface for measuring - carried out so that movement and direction of measuring beam lies vertical to surface and beam before impinging on detector is guided by lens system

摘要

The measuring beam (4) is astigmatically modified by the lens system (12). The modified measuring beam, in the middle between the focal lines of the radiation beam is detected by the detector (10), by means of several detector surfaces (13, fig.3), producing respectively a measuring signal, lying independent of each other, close together. The output signal is composed from the measuring signals. An electronic evaluation unit is provided, for assembling the measuring signals from the detector surfaces of the detector, to produce the output signal. The surface (2) for the measuring beam is reflecting. The detector is arranged fixed locally behind the lens system, and the measuring beam reflected from the surface is detected by the detector.