Mikromembranventil und Verfahren zu dessen Herstellung

摘要

The invention concerns a membrane-type microvalve consisting of a valve chamber and an actuator chamber, the valve chamber consisting of housing (1) with an inlet (3), an outlet (4) and a membrane (2) which is joined to the housing (1) along its edge to form a seal and the actuator chamber being mounted on the other side of the membrane (2) from the valve chamber . The aim of the invention is to design the valve in such a way that it can be manufactured simply and that large paths are possible for the membrane (2). This aim is achieved by virtue of the fact that the membrane (2) is kept mechanically under compressive strain and can adopt two stable states, the membrane (2) closing off the inlet (3) in one of these states.