INTEGRATED CIRCUIT CONTACTS WITH SECURED STRINGERS

摘要

A contact of large dimensions having a stringer (42) strongly adhered to a contact hole's (44) sidewalls. The contact hole (44) is made to have a patterned perimeter having grooves (40) protruding outward. The grooves have a size equal to a minimum contact dimension in at least one direction so as to ensure good step coverage into the groove areas. The grooves (40) serve to anchor the stringer (42) to the contact hole (44) sidewalls by increasing the sidewalls' surface area which increases adhesion, distributing stress from the stringer (42) to the groove areas, and providing grooves (40) with good step coverage.