HIGHLY EFFICIENT PROCESSING METHOD BASED ON HIGH DENSITY RADICAL REACTION AND USING ROTARY ELECTRODE, APPARATUS THEREFOR AND ROTATING ELECTRODE USED THEREFOR

摘要

A highly efficient processing method based on a high density radical reaction and using a rotating electrode, comprising supplying a large amount of a reaction gas to a processing gap between a processing electrode and an object being processed in a controlled state, increasing a limit value of an input power to increase a density of a neutral radical to sharply enhance a processing speed 10 to 100 times, preventing arc discharge and attaining thermal stability, an apparatus therefor and a rotating electrode used therefor. The method comprises arranging an endless processing electrode and an object being processed in a gas atmosphere containing a reaction gas and an inert gas with a processing gap formed, supplying a high-frequency electric power to the processing electrode, rotating the processing electrode at high speeds to move a surface of the processing electrode relative to that portion of the object being processed, which is being processed, at high speeds and to cause the gases to be entrained at the surface of the processing electrode to thereby form a gas flow crossing the processing gap, and vaporizing and removing a volatile matter produced by a radical reaction between a neutral radical produced in a plasma generated in the processing gap and atoms or molecules, which constitute the object being processed, to facilitate processing.