发明名称 LASER-INDUCED METALLIC PLASMA FOR CON-CONTACT INSPECTION
摘要 <p>An apparatus for testing an electrical part having a number of conductive paths. The apparatus includes a mechanism (10) directing a laser pulse to impinge upon a conductor (14) of the part under test so as to form a metallic plasma and one or more pairs of probes (16) which, along with the conductor and the plasma, form a part of an electrical circuit. Finally, the apparatus includes a detector (18) which is responsive to the amount of conduction via the plasma between the conductor and the probes.</p>
申请公布号 WO1997003365(A2) 申请公布日期 1997.01.30
申请号 US1996011698 申请日期 1996.07.11
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