Elektrostatischer Antrieb

摘要

The invention relates to an electrostatic drive, in particular an electrostatic micro-drive, comprising a stationary component forming a stator, and a component forming an actuator movable in relation to the stator, one component thereof having at least two electrodes for producing an electrical driving field forming therebetween and the other having a material arranged in the electrical driving field and interacting electrostatically with the driving field. The drive also comprises a control circuit which varies the electrical field with respect to time such that the actuator is moved in a desired direction of movement. To improve the drive in such a manner that as large a torque as possible for a given electrical field intensity can be achieved, it is proposed that the material interacting electrostatically with the drive field comprises at least one substantially constant ferroelectric domain with one ferroelectric material substantially polarised in a constant manner in only one direction.