Anlage und Verfahren zur Halbleiterbauelementherstellung

摘要

Liquid for use in the manufacture of semiconductor devices is degassed by passing it through the apparatus of Figure 5. After going through a heat-exchanger the liquid enters a filter comprising a bundle of 7,000 to 10,000 hollow microfibres made of a hydrophobic material. A vacuum pump lowers the pressure to between 700 and 550 mm Hg. The gas can penetrate the hydrophobic substance, which an aqueous fluid cannot; separation is thus enhanced.