HORIZONTAL PROCESSING TUBE DEVICE,申请号JP19950177692-传众专利搜索

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发明名称	HORIZONTAL PROCESSING TUBE DEVICE
摘要
申请公布号	JPH0927486(A)	申请公布日期	1997.01.28
申请号	JP19950177692	申请日期	1995.07.13
申请人	SONY CORP	发明人	YAMAGUCHI TADAHARU
分类号	C23C16/18;C23C16/44;H01L21/205;H01L21/31;H01L21/318;(IPC1-7):H01L21/31	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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