TRANSFERRING DEVICE OF SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To automatically transfer a plurality of semiconductor substrates housed in multiple stages in one magazine box into the other magazine all in one time without greatly damaging the semiconductor substrates. SOLUTION: A pusher body 6 which is to be pushed and inserted into a magazine box is provided at a reciprocating stand 3 which reciprocates in the direction of the magazine box so that it freely slide in the reciprocating direction, and a spring means 9 is provided between the pusher body 6 and the reciprocating stand 3 so that the advance movement of the reciprocating stand can be transferred to the advance movement of the pusher body.