发明名称 NON-CORROSIVE PHOTORESIST STRIPPER COMPOSITION
摘要 <p>A non-corrosive positive photoresist stripper composition comprising: (a) a solvent selected from N-methyl-2-pyrrolidone, N-hydroxyethyl-2-pyrrolidone, 1,3-dimethyl-2-imidazolidinone dimethylsulfoxide, and admixtures thereof; (b) a corrosion inhibitor selected from tricine, bicine, (2-benzothiozolythio)succinic acid, and admixtures thereof; (c) optionally, an alkanolamine selected from diethyleneglycolamine, monoethanolamine, diethanolamine, triethanolamine, and admixtures thereof; (d) optionally, water; and (e) optionally, a water-soluble surface active compound.</p>
申请公布号 WO1997003381(A1) 申请公布日期 1997.01.30
申请号 US1996010845 申请日期 1996.06.24
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