| 摘要 |
PROBLEM TO BE SOLVED: To effectively prevent an interference between mutual controlling means (controllers) when a stage is driven by driving means of the number more than the degree of freedom. SOLUTION: When a position of a stage 10 is detected by interferometers 20, 22, 24, converting means 26 converts data detected by the interferometers to a position each degree of freedom of a center of gravity of the stage and speed data. In PI controllers 54, 56, 58 each degree of freedom, based on a speed deviation in respective directions which is a difference between a speed conversion value of a position deviation in aθdirection, in a Y direction and in an X direction of a center of gravity and a speed in respective directions of a center of gravity, a control value each degree of freedom required for movements of a center of gravity is acquired by (proportional + integral) operations. In converting means 60, outputs of the controllers 54, 56, 58 are input and converted into a control value which is to be respectively generated in motors 12, 14, 16, 18. to give the control value converted to each of the motors as a command value. |
