摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element equal to the sensing capacity of edge of human visual system. SOLUTION: Within the title sensor element 40 minutely manufactured enabling the aerial distribution of a specific light intensity to be detected further provided with a substrate 42 with a gate electrode 44 arranged therwith, an electric insulating layer 46 made of silicon nitride is arranged on the gate electrode 44 while high concentration doped amorphous semiconductor layers 62, 63 are sticked on the insulating layer 46. Memory nodes 48 and collective contacts 50, 52 are formed is semiconductor layers 62, 63 while collective electrodes 54, 58 are arranged on the collective contacts 50, 52 and the other collective electrodes cover the two collective contacts. The sensor element 40 have four collective electrodes 54, 58. In such a constitution, the collective electrodes are formed to come into contact with corresponding collective contacts at low resistance value.
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