| 摘要 |
PROBLEM TO BE SOLVED: To measure P, B concentrations in a CVD film without lowering the accuracy even if a standard sample is stocked for a long period by using a calibration curve forming coordinate sample in which a CVD oxide film having high moisture absorbing characteristics is deposited for the calibration curve formation by an infrared absorption spectral method after a BPSG or PS film was deposited on an Si substrate. SOLUTION: After the infrared absorption spectrum 7 of an Si substrate 1 on which a CVD oxide film 6 is deposited, is measured, the infrared absorption spectra 8 of a CVD oxide film 6 or BPSG film 2 or Si substrate 1 in which the film thicknesses, B concentration and P concentration are known are measured, and the infrared absorption spectrum 9 of the film 2 is obtained from the difference of the both. The calibration curve of the thickness of the film 2 is obtained from the thickness of the calibration curve forming standard sample and the intensity of the peak 1 near 1100cm<-1> , the calibration curve of the P concentration of the film 2 is obtained from the P concentration of the standard sample and the intensity of the peak 2 near 1320cm<-1> , and the calibration curve of the film 2 is obtained from the B concentration of the standard sample and the intensity of the peak 2 near 1400cm<-1> . The sample in which the film thickness, P concentration and B concentration are unknown is measured by using the respective curves. |
