| 摘要 |
PROBLEM TO BE SOLVED: To make minimum a relative speed error between a stage on a substrate side and a stage on a mask side during canning. SOLUTION: A target rate Iwy is given to a speed control system 1 for performing speed control of a substrate stage and simultaneously a target speed Irc is given to a speed control system 2 for performing rate control of a mask stage so that the both stages can take the specific position relationship. Further, a speed deviation Xrc of the speed control system 2 is increased 1/4 times (projection magnifying power double) by a deviation feedback system 3 and fed back to a target output of the speed control system 1. Therefore, the following equation Ywy =Kwy /(s+Kwy )×(Yrc /4) is established, and if a response on the side of the speed control system 1 (on the side of the substrate stage) is excellent, even if a response on the side of the seed control system 2 (on the side of the mask stage) is bad, a ratio of speed between the stages is kept at 4:1. |
