| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which has a simple manufacturing process and can ensure the capacitance of a capacitor and to provide its manufacturing method. SOLUTION: An electrode, on one side, which constitutes a capacitor is a laminated body wherein expansive conductive films 32 whose grains are grown by a heat treatment and thermally stable conductive films 31 which are stable against a heat treatment are laminated alternately. Peripheral edge parts of the expansive conductive films protrude from peripheral edge parts of the thermally stable conductive films which are laminated at their upper and lower parts. In order to realize such a structure, the laminated body is manufactured in a laminated-film formation process wherein the expansive conductive films whose grains are grown by the heat treatment and the thermally stable conductive films which are stable against the heat treatment are formed alternately, in a patterning process in which the laminated body laminated in the film formation process is patterned and in a heat treatment process wherein the patterned laminated body is heat-treated and the expansive conductive films are grain- grown. |
