| 摘要 |
A composition having 1.0-50.0 wt % of a compound having both a structure of organosilane, organosilazane, or organosiloxazane and a structure of a dye compound which has light-absorbing capabilities in a particular wavelength band, 50.0-99.0 wt % of solvent, and optionally 0''10 wt % of a water-soluble polymer, improves adhesion to a photoresist film and anti-reflection characteristics in exposure.
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