| 摘要 |
PROBLEM TO BE SOLVED: To make the improvement of the conversion efficiency of a thin film solar cell and reduction in the deterioration of light possible by a method wherein the solar cell is formed into one of a structure, wherein a transparent electrode layer, a P-type polycrystalline silicon layer, an I-type amorphous silicon layer, an N-type silicon layer with an amorphous crystal or a mixed fine crystal and an amorphous crystal and a rear electrode layer are made to laminate in the order of these abovementioned layers on a light-transmitting substrate. SOLUTION: A thin film solar cell is formed into one of a structure, wherein a transparent electrode layer 3, a P-type polycrystalline silicon layer 5, an I-type amorphous silicon layer 7, an N-type silicon layer 9 with an amorphous crystal or a mixed fine crystal and an amorphous crystal and a rear electrode layer 11 are laminated in the order of these layers 3, 5, 7, 9 and 11 on a light-transmitting substrate 1. For example, the layer 5 is formed so that its film thickness is 700Å or thinner and its absorption coefficient to light of a short wavelength of 400nm is 10<5> cm<-1> or smaller. Moreover, after a first amorphous silicon layer containing a dopant is formed on the layer 3, the formation of a second amorphous silicon layer, which has a concentration lower than that of the first amorphous silicon layer and contains a dopant, and a hydrogen plasma treatment are repeated to form the layer 5. |
