| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate holder wherein a substrate cannot be damaged or electrified in the case it deviates when it is lifted by releasing suction or is lifted before the suction is not fully released. SOLUTION: When raising a support pin 4 by driving a motor 7, current flowing in the motor is detected by an ammeter 13 and is outputted to a motor control part 9. When the current value exceeds a specific reference value, a command is given from the motor control part 9 to a solenoid valve-control part 11 and a solenoid valve 12 is switched to a flow system.</p> |
