| 摘要 |
PROBLEM TO BE SOLVED: To provide an information detection device in which illumination light propagates only in a zero-order mode and in which normal-distribution illumination light is radiated. SOLUTION: A trunk waveguide 5 is formed by designing a waveguide width in such a way that it is a single-mode waveguide with reference to light of a wavelength ofλand that it is a double-mode waveguide with reference to light of a wavelength ofλ'. Thereby, when the light of the wavelength ofλis made inciddenton on the trunk waveguide 5 from a light source 1, the light propagates only in a zero-order mode, and it is converted into light at the wavelength ofλ' by an SHT region 6 so as to be radiated from an edge 7. When reflected light from an object 10 to be inspected enters the trunk waveguide 5 from the edge 7, the light in the zero-order mode and the light in a first-order mode are excited due to the symmetric property of the intensity distribution or the phase distribution of the reflected light, and they are detected by detectors 13, 14. |
