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发明名称
COATING APPARATUS FOR CHEMICAL VAPOR DEPOSITION
摘要
申请公布号
KR970000511(Y1)
申请公布日期
1997.01.27
申请号
KR19940022833U
申请日期
1994.09.05
申请人
KOREA TUNGSTEN CO.,LTD
发明人
HU, SE-WOOK;KIM, JONG-SUNG;LEE, SANG-HOON
分类号
C23C16/54;(IPC1-7):C23C16/54
主分类号
C23C16/54
代理机构
代理人
主权项
地址
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