System für Vakuum-Behandlung,申请号DE1991620219T-传众专利搜索

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发明名称	System für Vakuum-Behandlung
摘要
申请公布号	DE69120219(T2)	申请公布日期	1997.01.23
申请号	DE1991620219T	申请日期	1991.11.25
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	KATO, SHIGEKAZU, KUDAMATSU-SHI, JP;TAMURA, NAOYUKI, KUDAMATSU-SHI, JP;NISHIHATA, KOUJI, TOKUYAMA-SHI, JP;TSUBONE, TSUNEHIKO, HIKARI-SHI, JP;ITOU, ATSUSHI, KUDAMATSU-SHI, JP
分类号	B01J3/02;B65G49/07;H01L21/677;(IPC1-7):H01L21/00	主分类号	B01J3/02
代理机构		代理人
主权项
地址

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