ACCELERATION SENSOR

摘要

An acceleration sensor, in particular a Coriolis rotation velocity sensor, has an oscillating structure that is movably suspended from a substrate (base) and can be deflected under the effect of acceleration, means for causing the oscillating structure to carry out a planar oscillating motion, in particular an oscillating rotary motion, and evaluating means for sensing an acceleration-caused deflection of the oscillating structure, in particular for sensing a Coriolis acceleration. The oscillating structure (12) is suspended in a swivelling manner to be able to carry out a planar oscillating motion and is designed to carry out a planar oscillating rotary motion.