Rotation rate sensor with which acceleration sensor is arranged on oscillator

摘要

The oscillator (4) oscillates parallel to the multi-layered substrate. The oscillator is surrounded by a frame (11), and the stops (41,42) are provided as parallel stops at the frame and the oscillator, in such a manner. That the deflections of the oscillator are restricted parallel to the substrate. The thickness of the lower silicon layer under the oscillator is reduced. A lower stop is provided, by which the deflection of the oscillator is restricted vertically to the oscillating direction. The lower stop is structured from the lower layer.