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发明名称
Strahlungsempfindliche Kunststoffzusammensetzung
摘要
申请公布号
DE69028364(T2)
申请公布日期
1997.01.23
申请号
DE19906028364T
申请日期
1990.09.19
申请人
TORAY INDUSTRIES, INC., TOKIO/TOKYO, JP
发明人
TOMIKAWA, MASAO, MUKO-SHI, KYOTO-FU, JP;ASANO, MASAYA, OTSU-SHI, SHIGA-KEN, JP
分类号
G03F7/038;C08K5/06;C08K5/07;C08K5/10;C08K5/17;C08L79/08;G03F7/004;G03F7/027;G03F7/037;H01L21/027;(IPC1-7):G03F7/037
主分类号
G03F7/038
代理机构
代理人
主权项
地址
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