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发明名称
Displacement device with piezoelectric actuator
摘要
申请公布号
EP0624912(B1)
申请公布日期
1997.01.22
申请号
EP19930117955
申请日期
1993.11.05
申请人
PHYSIK INSTRUMENTE (PI) GMBH & CO.
发明人
GLOESS, RAINER, DR.;MARTH, HARRY, DR.
分类号
H01L41/09;H02N2/04;(IPC1-7):H01L41/09
主分类号
H01L41/09
代理机构
代理人
主权项
地址
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