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发明名称
ELECTRON BEAM EXIT WINDOW
摘要
申请公布号
EP0646283(B1)
申请公布日期
1997.01.22
申请号
EP19930911733
申请日期
1993.05.03
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
ROEDER, OLAF;SEYFERT, ULF;PANZER, SIEGFRIED
分类号
H01J5/18;H01J33/04;(IPC1-7):H01J33/04
主分类号
H01J5/18
代理机构
代理人
主权项
地址
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