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发明名称
FLANGE UNIT AND HORIZONTAL PROCESS TUBE APPARATUS USING THE SAME
摘要
申请公布号
JPH0922902(A)
申请公布日期
1997.01.21
申请号
JP19950172106
申请日期
1995.07.07
申请人
SONY CORP
发明人
FUKUNAGA SHINICHI
分类号
C23C16/44;H01L21/22;H01L21/31;H01L21/318;(IPC1-7):H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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