THIN-FILM VAPOR PHASE GROWTH DEVICE,申请号JP19950192627-传众专利搜索

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发明名称	THIN-FILM VAPOR PHASE GROWTH DEVICE
摘要
申请公布号	JPH0922875(A)	申请公布日期	1997.01.21
申请号	JP19950192627	申请日期	1995.07.06
申请人	NISSIN ELECTRIC CO LTD	发明人	SETOGUCHI YOSHITAKA
分类号	C23C16/18;C23C16/44;H01L21/205;H01L21/304;(IPC1-7):H01L21/205	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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