| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor dynamic quantity sensor which can be made to be hardly displaced in the other direction other than the dynamic quantity detecting direction of the sensor. SOLUTION: Mobile sections 4 are arranged at a prescribed interval on a silicon substrate 1. The beam section 6 of each mobile section 4 is formed in a U-shape and a third belt-like section 63 which is part of the beam section 6 has a width wider than those of the other areas (W3>W1 and W3>W2) and a length shorter than those of the other areas (L3<L1 and L3<L2) so that the mobile section 4 is hardly displaced in X-direction (acceleration nondetecting direction) perpendicular to Y-direction which is the acceleration detecting direction of a semiconductor dynamic quantity sensor. Therefore, even when acceleration acts on the mobile sections 4 in the direction parallel to the surface of the substrate 1, the displacement of the mobile sections 4 in the other axis direction (X-direction) becomes smaller and the sensor can detect the acceleration with high accuracy, because the spring constant in the other axis direction is large.</p> |
