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发明名称
FORMING METHOD FOR WIRINGS
摘要
申请公布号
JPH0922909(A)
申请公布日期
1997.01.21
申请号
JP19950171231
申请日期
1995.07.06
申请人
KOBE STEEL LTD
发明人
SUZUKI KOHEI
分类号
H01L21/28;H01L21/265;H01L21/3205;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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