| 摘要 |
PROBLEM TO BE SOLVED: To provide a compsn. having high sensitivity and high resolution of quarter micron or below and excellent in heat resistance, etc. SOLUTION: This compsn. consists of a resin component whose solubility to an aq. alkali soln. is increased by the action of an acid, a compd. which generates the acid when irradiated and an org. carboxylic acid compd. The resin component is a mixture of polyhydroxystyrene having a wt. average mol.wt. of 8,000-22,000 and having residues represented by the formula (where R<1> is H or methyl, R<2> is methyl or ethyl and R<3> is 1-4C lower alkyl) and substd. for 10-60mol% of the hydroxyl groups with polyhydroxystyrene having a wt. average mol.wt. of 8,000-22,000 and having tert-butoxycarbonyloxy groups substd. for 10-60mol% of the hydroxyl groups. |
