| 摘要 |
PROBLEM TO BE SOLVED: To enable the high-speed and high-accuracy control of an object to be controlled to be realized by separating a frequency domain into a low frequency domain and a resonance frequency domain and attempting the trade-of of target position followup ability and damping performance. SOLUTION: A damping controller 9 receives an output x1 -x2 of a displacement detector 7 and an output x2 -γ of a controller 8 as inputs, operates a rotating speed command μ to a motor 4 for suppressing the vibration of a body structure 2 based on these inputs and outputs this command to a motor driving device 10. In this case, concerning the function value of a frequency weight function to be multiplied to a sensitivity function showing the target position followup ability of a movable part, a function value corresponding to the low frequency domain lower than a prescribed frequency is decided so as to be larger than function values corresponding to the other frequency domains. Besides, concerning the function value of a frequency weight function to be multiplied to a sensitivity function showing the vibration suppressing performance of the object to be controlled, a function value corresponding to the resonance frequency of the object to be controlled is decided so as to be larger than function values corresponding to the other frequency domains. |
