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发明名称
ULTRASONIC WASHING DEVICE
摘要
申请公布号
JPH0919664(A)
申请公布日期
1997.01.21
申请号
JP19950168725
申请日期
1995.07.04
申请人
SHIBAURA ENG WORKS CO LTD
发明人
MATSUZAKI NOBUKI
分类号
G02F1/13;B08B3/12;H01L21/304;(IPC1-7):B08B3/12
主分类号
G02F1/13
代理机构
代理人
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