| 摘要 |
PROBLEM TO BE SOLVED: To perform a right insepction even if the reference image imaging an object under the same environment as the image pickup of an inspection image is used by comparing the matched part of the reference image and the inspection image and the reference image outside an area. SOLUTION: The shape of an inspction object is insepcted by preparing a reference image by imaging an object under the same environment as the image pickup of an inspection image, designating the area where the influence due to disturbance exists on a reference image, determining the matched part of the reference image and the inspection image and comparing this matched part and the reference image outside an area. In this case, the part in which the contour lines are matched of the first reference image stored in a reference image reading and preservation means 32 and the inspection image obtained by a contour line extraction means 25 is detected in a matched part detection means 33. Further, the ratio of the number of picture element showing the matched part detected by the matched part detection means 33 and the number of picture element showing the reference object in the first reference image is determined in a comparison means 34 and whether the inspection object is proper or not is decided. |
