| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the manhour, to improve the reliability of a connection part, and to provide the image of high quality with the picture element arrangement at a high density by simplifying the structure of an electrode and a wiring part in an electron source, in which plural electron emitting elements are arranged. SOLUTION: A pair of element electrodes 11, 12 are formed on a substrate (a), and a wiring 13 of a first layer is formed (b), and a band-shaped inter-layer insulating film 14 is formed (c). A wiring 15 of a second layer is simultaneously formed with the connection of the element electrode 11 in a recessed part 14a (d), and a wiring 16 of a third layer is repeated with the same material in the same condition with the wiring 15 (e) for the perfect contact, and the wiring at a low resistance is enabled. Finally, a film 17 of an electron emitting part is formed between the element electrodes (f) so as to finish the electron emitting element for electron source. Reliability of the connection part of the electrode and the wiring is thereby improved, and the generation of unevenness of image due to an increase of the wiring resistance is prevented, and a device with a large screen, of which image is finely divided, is obtained.</p> |
