Orthogonal RFDC transverse excited gas laser

摘要

A gas laser having a housing including a discharge region that contains a lasing gas medium, a pair of DC electrodes having primary surfaces facing toward the discharge region, the primary surfaces being arranged in substantially parallel planes, and a pair of RF electrodes having secondary surfaces facing toward the discharge region, the secondary surfaces being in substantially parallel planes with the secondary surfaces being arranged substantially orthogonal to the primary surfaces. The gas laser also has an RF power source connected between said pair of RF electrodes and selectively generating an RF discharge in the discharge region, and a DC power source connected between said pair of DC electrodes and selectively generating a DC discharge in the discharge region.