| 摘要 |
PROBLEM TO BE SOLVED: To correctly and automatically detect in a noncontact manner how much a first and a second faces are separated or continue, by detecting a distance of the first and second faces based on an offset of interference fringes of a first and a second image areas. SOLUTION: An automatic inspection device 90 is equipped with an interferometer 98 which is arranged with an angleϕto a target face to be measured. When the target face is disposed with the angleϕto the interferometer 98, interference fringes are overlapped at an image caught by the interferometer 98. A video camera 101 catches the image and is connected to the interferometer 98 so as to code the image. A mechanical visual system 92 connected to the camera 101 receives the image and measures an offset of interference fringes between within a first area on a first face and within a second area on a second face. Moreover, a distance of the faces is detected from the offset. An output device 93 controlled by the system 92 informs data of the distance to a user.
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