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发明名称
PRODUCTION OF PLATINUM FILM
摘要
申请公布号
JPH0920980(A)
申请公布日期
1997.01.21
申请号
JP19950168661
申请日期
1995.07.04
申请人
MITSUBISHI MATERIALS CORP
发明人
SAI ATSUSHI;UCHIDA HIROTO;SATO MASAMITSU;OGI KATSUMI
分类号
C07F15/00;C23C16/18;H01L21/285;(IPC1-7):C23C16/18
主分类号
C07F15/00
代理机构
代理人
主权项
地址
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