摘要 |
<p>PURPOSE: To significantly simplify a patterning process of a conductive thin film being an electron emitting film to emit an electron. CONSTITUTION: A pair of element electrodes 102 and 103 are formed on a surface of a base board 101, and a conductive thin film 110 is formed over the whole surface of the base board 101 on which the element electrodes 102 and 103 are formed. Next, a laser beam 111 is irradiated to the conductive thin film 110, and an unnecessary part of the conductive film 110 is removed by relatively scanning the base board 101 and the lase beam 111, and the conductive thin film 110 is formed an electron emitting film to connect the element electrodes 102 and 103 to each other. Afterwards, the electron emitting film is put in a locally and electrically high resistance condition by current-carrying or the like, and a surface conduction type electron emitting element is obtained.</p> |