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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0917784(A)
申请公布日期
1997.01.17
申请号
JP19950161333
申请日期
1995.06.28
申请人
NEC CORP
发明人
SAITOU YURIE
分类号
H01L21/28;C23C18/31;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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