| 摘要 |
PURPOSE: To easily remove an anomalously grown bump electrode. CONSTITUTION: An anomalous bump electrode 16 with an anomalously grown part 16a is removed through such a manner that the root 9 of the anomalous bump electrode 16 is fused by irradiation with a laser beam from a laser source 10, and then the anomalous bump electrode 16 is held with a pair of pincers, pulled up by applying an external force in a horizontal direction, and removed by cleaving the base of the bump electrode 16. |
