FORMATION OF WIRING STRUCTURE HAVING PROCESS FOR FORMING CONNECTION HOLE,申请号JP19950161927-传众专利搜索

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发明名称	FORMATION OF WIRING STRUCTURE HAVING PROCESS FOR FORMING CONNECTION HOLE
摘要
申请公布号	JPH0917862(A)	申请公布日期	1997.01.17
申请号	JP19950161927	申请日期	1995.06.28
申请人	SONY CORP	发明人	KIMURA TADAYUKI
分类号	H01L21/28;H01L21/027;H01L21/302;H01L21/3065;H01L21/768;(IPC1-7):H01L21/768;H01L21/306	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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