发明名称 GALVANOMETER AND CAMERA SYSTEM
摘要 A system (20) combines a galvanometer system (22) with a camera (26) to provide information from a workpiece (27) to the camera (26). The galvanometer (22) rotates mirrors (23) to change the image that is directed from the workpiece (27) to the camera (26). The inventive method allows the use of the camera (26) to identify the location of points on the workpiece. Further, the system facilitates the use of the camera (26) to store information about a pattern on a workpiece (27).
申请公布号 WO9701740(A1) 申请公布日期 1997.01.16
申请号 WO1996US08008 申请日期 1996.05.30
申请人 VIRTEK VISION CORP. 发明人 RUEB, KURT;WONG, ANDREW
分类号 G01B11/00;(IPC1-7):G01B11/00 主分类号 G01B11/00
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