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发明名称
CARRIER PLATE FOR WAFER CLEANING PROCESS
摘要
申请公布号
KR970000384(Y1)
申请公布日期
1997.01.17
申请号
KR19920028412U
申请日期
1992.12.31
申请人
HYUNDAI ELECTRONICS IND.CO.,LTD.
发明人
JANG, BYUNG-HOON;SUN, JONG-WOONG;CHOE, DON-CHON
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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