Pyroelectric device with high integration density - has detector window anisotropically etched in substrate which supports electrically insulating membrane with pyro-detector element above membrane
摘要
<p>The pyroelectric device has a substrate which can be anisotropically etched and which acts as a membrane support (MT). A detector window (DF) is arranged in the substrate. An electrically insulating membrane (M) spans the detector window. A pyro-detector element (PDE) is arranged above the membrane and above the detector window. A (100) oriented monocrystalline silicon layer is above the membrane. A read-out circuit is realized in the silicon layer. In one embodiment the membrane support is formed from a (110) oriented silicon wafer.</p>
